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Precision Stage Product List

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Electric Actuator A/AX (Precision Stage) [THK Official]

Electric Actuator A/AX (Precision Stage) [THK Official]

High precision with a wide variety, suitable for various applications.

THK's electric actuator precision stage series A/AX (single axis/XY) has achieved a compact design with a height reduction of up to approximately 27% compared to conventional models with the same stroke. Available in both iron and aluminum specifications, it can be selected according to the application. In the case of the aluminum specification, it has also achieved a reduction in body weight of up to approximately 72% compared to conventional models. Additionally, the related links provide a wealth of technical information, including detailed product descriptions, product catalogs, user manuals, specification drawings, dimension tables, and 2D CAD files. Please take a look at these as well.

  • Semiconductor inspection/test equipment
  • Metal bearings
  • Actuator
  • Precision Stage

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Electric Actuator CHX (Precision Stage) [THK Official]

Electric Actuator CHX (Precision Stage) [THK Official]

Achieving ultra-thin, high rigidity, and high precision.

THK's electric actuator precision stage series CHX (compact alignment stage) achieves a super-thin design for miniaturizing the top table, featuring high rigidity and high precision. It is used in various fields requiring high precision, such as optical equipment, medical devices, biotechnology, solar cells, optical lens bonding equipment, probe inspection devices, chip device exposure and printing, dispensing devices, fine laser processing machines, and alignment for chip mounters. Additionally, the related links provide more detailed product descriptions, product catalogs, specification drawings, dimension tables, and a wealth of technical information. Please take a look at those as well.

  • Semiconductor inspection/test equipment
  • Precision Stage

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Electric Actuator CMX (Precision Stage) [THK Official]

Electric Actuator CMX (Precision Stage) [THK Official]

Ultra-thin stage featuring a groundbreaking modular structure (patented)

THK's electric actuator precision stage series CMX (alignment stage) standardizes large stages with a top table size of 1500mm x 1500mm to accommodate large workpieces, and achieves ultra-thin and lightweight design through a saddle-less mechanism. Furthermore, due to its hollow structure, it is adopted in optical inspection devices and continuity testers. Additionally, it is used in various fields such as FPD manufacturing and inspection equipment, semiconductor manufacturing and inspection equipment, screen printing machines and mask inspection devices, printed circuit board manufacturing and inspection equipment, solar cell manufacturing and inspection equipment, and electronic device manufacturing and inspection equipment. Moreover, the related links provide a wealth of technical information, including detailed product descriptions, product catalogs, user manuals, specification drawings, dimension tables, and 2D CAD files. Please take a look at these as well.

  • Semiconductor inspection/test equipment
  • Other machine elements
  • Actuator
  • Precision Stage

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